目录······1
1 总 则······12
2 术 语······13
3 基本规定······14
4 工 艺······15
4.1 一般规定······15
4,2 基本工序与生产协作······15
4.3 工艺区划······16
4,4 设备布置······16
5 总 图······17
5.1 厂址选择······17
5,2 总平面布置······17
6 建 筑······19
6,1 一般规定······19
6.2 防火及安全疏散······19
7 结 构······21
7.1 一般规定······21
7.2 结构设计······21
8 动力及气体工程······23
8,1 冷热源······23
8.2 大宗气体供应······24
8.3 特种气体供应······25
8.4 动力气体供应······27
9 供暖、通风、空气调节与净化······29
9.1 一般规定······29
9.2 供暖、通风与废气处理······29
9.3 空气调节与净化······31
9.4 防排烟······32
10 给水排水······33
10.1 一般规定······33
10.2 一般给水排水······33
10.3 纯水······34
10.4 工艺冷却循环水······34
lO.5 废水处理······35
10.6 消防······35
11 电 气······37
l1.l 供配电与照明······37
11.2 防雷与接地······38
11.3 白控······38
11.4 通信······39
11,5 安全防护······39
12 防静电······41
12.1 一般规定······41
12.2 防静电措施······41
12.3 防静电接地······43
13 空间管理······44
13.1 一般规定······44
13.2 管线布置······44
附录A 发光二极管典型生产环境要求······46
附录B 发光二极管生产工艺动力品质要求······47
附录C 发光二极管生产的典型工艺流程······49
本规范用词说明······51
引用标准名录······52
附:条文说明······54
1 总 则······60
2 术 语······61
3 基本规定······62
4 工 艺······63
4,1 一般规定······63
4.2 基本工序与生产协作······64
4.3 工艺区划······64
4.4 设备布置······65
5 总 图······66
5.1 厂址选择······66
5.2 总平面布置······67
6 建 筑······68
6.1 一般规定······68
6.2 防火及安全疏散······69
7 结 构······72
7.1 一般规定······72
7,2 结构设计······72
8 动力及气体工程······74
8.1 冷热源······74
8.2 大宗气体供应······75
8.3 特种气体供应······76
8.4 动力气体供应······78
9 供暖、通风、空气调节与净化······80
9.1 一般规定······80
9.2 供暖、通风与废气处理······80
9.3 空气调节与净化······82
9,4 防排烟······83
10 给水排水······85
10.1 一般规定······85
10.2 一般给水排水······85
10.3 纯水······87
10.4 工艺冷却循环水······87
10.5 废水处理······88
10.6 消防······88
11 电 气······89
11.1 供配电与照明······89
11.2 防雷与接地······91
11.4 通信······91
11.5 安全防护······91
12 防静电······94
12.1 一般规定······94
12,2 防静电措施······95
12.3 防静电接地······96
13 空间管理······97
13.l 一般规定······97
13.2 管线布置······97
